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Qhia ib lub carousel ntawm peb slides ib zaug.Siv cov nyees khawm dhau los thiab Tom ntej kom txav mus los ntawm peb qhov swb ib zaug, lossis siv cov khawm slider thaum kawg kom txav mus los ntawm peb qhov swb ib zaug.
Direct laser cuam tshuam (DLIP) ua ke nrog laser-induced periodic nto qauv (LIPSS) tso cai rau kev tsim cov chaw ua haujlwm rau ntau yam ntaub ntawv.Cov kev dhau los ntawm cov txheej txheem feem ntau yog nce los ntawm kev siv lub zog nruab nrab siab dua laser.Txawm li cas los xij, qhov no ua rau lub tsub zuj zuj ntawm cov cua sov, uas cuam tshuam rau qhov roughness thiab cov duab ntawm qhov tshwm sim ntawm tus qauv.Yog li ntawd, nws yog ib qho tsim nyog yuav tau kawm kom meej txog qhov cuam tshuam ntawm qhov kub thiab txias ntawm lub substrate ntawm morphology ntawm cov khoom tsim.Nyob rau hauv txoj kev tshawb no, cov hlau nto yog kab-patterned nrog ps-DLIP ntawm 532 nm.Txhawm rau tshawb xyuas qhov cuam tshuam ntawm qhov kub ntawm substrate ntawm qhov tshwm sim saum toj no, lub phaj cua sov tau siv los tswj qhov kub.Cua sov rau 250 \(^{\circ }\) С coj mus rau qhov txo qis hauv qhov tob ntawm cov qauv tsim los ntawm 2.33 mus rau 1.06 µm.Qhov txo qis tau cuam tshuam nrog cov tsos ntawm ntau hom LIPSS nyob ntawm kev taw qhia ntawm cov substrate nplej thiab laser-induced nto oxidation.Txoj kev tshawb no qhia tau hais tias muaj zog ntawm qhov kub thiab txias ntawm substrate, uas tseem xav tau thaum kho qhov chaw ua haujlwm ntawm lub zog nruab nrab ntawm lub zog laser los tsim cov teebmeem kub.
Txoj kev kho deg raws li ultrashort mem tes laser irradiation yog nyob rau hauv pem hauv ntej ntawm kev tshawb fawb thiab kev lag luam vim lawv lub peev xwm los txhim kho cov khoom nto ntawm cov ntaub ntawv tseem ceeb tshaj plaws 1.Hauv particular, laser-induced custom nto functionality yog lub xeev-ntawm-tus-kos duab nyob rau hauv ib tug ntau yam ntawm industrial sectors thiab daim ntawv thov scenarios1,2,3.Piv txwv li, Vercillo et al.Anti-icing zog tau pom nyob rau hauv titanium alloys rau aerospace daim ntaub ntawv raws li laser-induced superhydrophobicity.Epperlein thiab al qhia tias nanosized nta tsim los ntawm laser nto structuring tuaj yeem cuam tshuam biofilm kev loj hlob lossis inhibition ntawm cov qauv steel5.Tsis tas li ntawd, Guai et al.kuj tau txhim kho cov khoom kho qhov muag ntawm cov organic solar cells.6 Yog li, laser structuring tso cai rau zus tau tej cov high-resolution structural hais los ntawm kev tswj ablation ntawm cov khoom nto1.
Cov txheej txheem tsim cov txheej txheem laser tsim los tsim cov txheej txheem ntu ntu yog ncaj qha laser cuam tshuam shaping (DLIP).DLIP yog ua raws li qhov ze-nto cuam tshuam ntawm ob lossis ntau dua laser kab teeb los tsim cov qauv nrog cov yam ntxwv hauv micrometer thiab nanometer ntau yam.Nyob ntawm tus naj npawb thiab polarization ntawm cov kab teeb laser, DLIP tuaj yeem tsim thiab tsim ntau yam ntawm cov qauv saum toj kawg nkaus.Ib txoj hauv kev zoo yog los ua ke DLIP cov qauv nrog laser-induced periodic surface structures (LIPSS) los tsim ib qho chaw saum toj kawg nkaus nrog cov txheej txheem txheej txheem hierarchy8,9,10,11,12.Nyob rau hauv qhov xwm txheej, cov hierarchies no tau pom tias muab kev ua tau zoo dua li cov qauv ib zaug 13.
LIPSS muaj nuj nqi yog raug rau tus kheej-amplifying txheej txheem (cov lus pom zoo) raws li qhov nce nyob ze ntawm qhov kev hloov pauv ntawm cov hluav taws xob siv hluav taws xob.Qhov no yog vim muaj kev nce hauv nanoroughness raws li tus naj npawb ntawm cov ntaub ntawv laser pulses nce 14, 15, 16. Modulation tshwm sim feem ntau yog vim muaj kev cuam tshuam ntawm emission yoj nrog electromagnetic teb 15,17,18,19,20,21 ntawm refracted thiab tawg ntho yoj Cheebtsam los yog nto plasmons.Qhov tsim ntawm LIPSS kuj cuam tshuam los ntawm lub sijhawm ntawm pulses22,23.Hauv particular, siab dua nruab nrab laser powers yog indispensable rau siab productivity nto kho.Qhov no feem ntau yuav tsum tau siv cov nqi rov ua dua, piv txwv li hauv MHz ntau.Yog li ntawd, lub sij hawm nyob deb ntawm laser pulses yog luv, uas ua rau cov cua kub tsub zuj zuj los ntawm 23, 24, 25, 26. Cov nyhuv no ua rau ib tug zuag qhia tag nrho nce nyob rau hauv qhov kub thiab txias, uas muaj peev xwm ho cuam tshuam lub patterning mechanism thaum lub sij hawm laser ablation.
Hauv kev ua haujlwm dhau los, Rudenko et al.and Tzibidis et al.Ib lub tswv yim rau kev tsim cov qauv convective tau tham, uas yuav tsum tau ua qhov tseem ceeb ntxiv thaum tshav kub kub nce 19,27.Tsis tas li ntawd, Bauer et al.Correlate qhov tseem ceeb ntawm cov cua kub tsub zuj zuj nrog micron nto qauv.Txawm hais tias qhov txheej txheem thermally induced tsim, nws feem ntau ntseeg tias cov khoom tsim tau tuaj yeem txhim kho tau yooj yim los ntawm kev nce tus nqi rov ua dua 28.Txawm hais tias qhov no, nyob rau hauv lem, tsis tuaj yeem ua tiav yam tsis muaj qhov nce ntxiv hauv cov cua sov.Yog li ntawd, cov txheej txheem cov tswv yim uas muab ib tug multilevel topology tej zaum yuav tsis portable rau ntau dua repetition tus nqi yam tsis tau hloov cov txheej txheem kinetics thiab cov qauv tsim9,12.Hauv qhov no, nws yog ib qho tseem ceeb heev uas yuav tsum tau tshawb xyuas seb qhov kub ntawm lub substrate cuam tshuam li cas rau cov txheej txheem tsim DLIP, tshwj xeeb tshaj yog thaum ua cov txheej txheem txheej txheej vim yog kev tsim ib txhij ntawm LIPSS.
Lub hom phiaj ntawm txoj kev tshawb no yog los soj ntsuam cov txiaj ntsig ntawm qhov kub thiab txias ntawm qhov tshwm sim saum npoo av thaum lub sij hawm DLIP ua cov hlau tsis huv siv ps pulses.Thaum lub sij hawm laser ua, qhov kub ntawm cov qauv substrate tau coj mus txog 250 \ (^ \ circ \) C siv lub phaj cua sov.Cov txheej txheem saum npoo tau tshwm sim los ntawm kev siv confocal microscopy, scanning electron microscopy, thiab lub zog-dispersive X-ray spectroscopy.
Hauv thawj qhov kev sim, cov hlau substrate tau ua tiav siv ob-nqaj DLIP teeb tsa nrog lub sijhawm spatial ntawm 4.5 µm thiab substrate kub ntawm \(T_{\mathrm {s}}\) 21 \(^{\circ }\)C, tom qab ntawd hu ua "unheated" nto.Hauv qhov no, pulse overlap \(o_{\mathrm {p}}\) yog qhov kev ncua deb ntawm ob lub pulses raws li kev ua haujlwm ntawm qhov chaw loj.Nws txawv ntawm 99.0% (100 pulses ib txoj hauj lwm) mus rau 99.67% (300 pulses ib txoj hauj lwm).Nyob rau hauv txhua rooj plaub, lub ncov lub zog ceev \(\Phi _\mathrm {p}\) = 0.5 J/cm\(^2\) (rau Gaussian sib npaug yam tsis muaj cuam tshuam) thiab qhov zaus zaus f = 200 kHz tau siv.Cov kev taw qhia ntawm polarization ntawm lub laser beam yog nyob rau tib lub sij hawm mus rau lub zog ntawm lub positioning rooj (Fig. 1a)), uas yog parallel mus rau cov kev taw qhia ntawm linear geometry tsim los ntawm ob-beam interference qauv.Cov duab sawv cev ntawm cov qauv tau txais los ntawm kev siv lub tshuab ntsuas hluav taws xob scanning (SEM) tau pom hauv daim duab.1 a-c.Txhawm rau txhawb kev tsom xam ntawm SEM cov duab nyob rau hauv cov nqe lus ntawm topography, Fourier transforms (FFTs, pom nyob rau hauv tsaus insets) tau ua nyob rau hauv cov qauv raug soj ntsuam.Nyob rau hauv txhua rooj plaub, qhov tshwm sim DLIP geometry tau pom nrog lub sijhawm spatial ntawm 4.5 µm.
Rau cov ntaub ntawv \(o_{\mathrm {p}}\) = 99.0% nyob rau hauv lub darker cheeb tsam ntawm daim duab.1a, sib xws rau txoj haujlwm ntawm qhov cuam tshuam siab tshaj plaws, ib tus tuaj yeem soj ntsuam cov grooves uas muaj cov qauv sib luag me me.Lawv hloov nrog cov kab ci ntsa iab uas npog hauv nanoparticle zoo li topography.Vim hais tias cov qauv sib npaug ntawm cov grooves zoo li perpendicular rau lub polarization ntawm lub laser beam thiab muaj lub sij hawm ntawm \(\Lambda _{\mathrm {LSFL-I}}\) 418\(\pm 65\) nm, me ntsis tsawg dua lub wavelength ntawm lub laser \(\lambda\) (532 nm) tuaj yeem hu ua LIPSS nrog tsawg zaus (LSFL-I) 15,18.LSFL-Kuv ua ib qho kev hu ua s-hom teeb liab hauv FFT, "s" tawg 15,20.Yog li ntawd, lub teeb liab yog perpendicular mus rau lub hauv paus muaj zog ntsug, uas nyob rau hauv lem yog generated los ntawm lub DLIP qauv (\(\Lambda _{\mathrm {DLIP}}\) \(\approx\) 4.5 µm).Lub teeb liab tsim los ntawm cov qauv linear ntawm DLIP qauv hauv FFT duab yog hu ua "DLIP-type".
SEM cov duab ntawm cov qauv saum npoo tsim siv DLIP.Lub zog siab ceev yog \(\Phi _\mathrm {p}\) = 0.5 J/cm\(^2\) (rau qhov tsis muaj suab nrov Gaussian sib npaug) thiab tus nqi rov ua dua f = 200 kHz.Cov duab qhia qhov ntsuas kub, polarization thiab overlay.Lub zog ntawm cov theem hauv cheeb tsam yog cim nrog lub xub dub hauv (a).Lub inset dub qhia txog qhov sib thooj FFT tau los ntawm 37.25\(\times\)37.25 µm SEM duab (pom kom txog thaum lub wavevector ua \(\vec {k}\cdot (2\pi )^ {-1}\) = 200 nm).Cov txheej txheem tsis tau qhia nyob rau hauv txhua daim duab.
Saib ntxiv mus rau hauv daim duab 1, koj tuaj yeem pom tias yog qhov sib tshooj ntawm \(o_{\mathrm {p}}\) sib tshooj, cov teeb liab sigmoid muaj ntau ntau rau ntawm x-axis ntawm FFT.Tus so ntawm LSFL-Kuv nyiam ua kom sib npaug.Tsis tas li ntawd, tus txheeb ze siv ntawm s-hom teeb liab poob thiab qhov kev siv ntawm DLIP-hom teeb liab nce.Qhov no yog vim muaj kev tshaj tawm trenches nrog ntau sib tshooj.Tsis tas li ntawd, x-axis teeb liab ntawm hom s thiab qhov chaw nruab nrab yuav tsum yog los ntawm cov qauv uas muaj kev taw qhia tib yam li LSFL-I tab sis nrog lub sijhawm ntev (\(\Lambda _\mathrm {b}\) \(\approx \ ) 1.4 ± 0.2 µm) raws li qhia hauv daim duab 1c).Yog li ntawd, nws yog assumed tias lawv tsim yog ib tug qauv ntawm pits nyob rau hauv nruab nrab ntawm lub trench.Cov yam ntxwv tshiab kuj tshwm sim nyob rau hauv ntau zaus (loj wavenumber) ntawm ordinate.Lub teeb liab los ntawm kev sib txuas ntawm cov ripples ntawm txoj kab nqes ntawm trench, feem ntau yuav yog vim muaj kev cuam tshuam ntawm qhov xwm txheej thiab lub teeb pom kev rau pem hauv ntej ntawm txoj kab nqes9,14.Hauv qab no, cov ripples no tau hais los ntawm LSFL \ (_ \ mathrm {edge} \), thiab lawv cov cim - los ntawm hom -s \ (_ {\ mathrm {p)) \).
Hauv kev sim tom ntej, qhov ntsuas kub ntawm cov qauv tau coj mus txog 250 ° C nyob rau hauv qhov hu ua "rhaub" nto.Kev tsim qauv tau ua raws li tib lub tswv yim ua raws li cov kev sim uas tau hais hauv ntu dhau los (Figs. 1a–1c).Cov duab SEM qhia txog qhov tshwm sim saum toj kawg nkaus raws li qhia hauv daim duab 1d–f.Ua kom sov cov qauv mus rau 250 C ua rau muaj kev nce ntxiv hauv cov tsos ntawm LSFL, cov kev taw qhia uas yog sib npaug rau lub laser polarization.Cov qauv no tuaj yeem ua tus yam ntxwv li LSFL-II thiab muaj lub sijhawm spatial \(\Lambda _\mathrm {LSFL-II}\) ntawm 247 ± 35 nm.Lub teeb liab LSFL-II tsis tshwm nyob rau hauv FFT vim yog hom siab zaus.Raws li \(o_{\mathrm {p}}\) tau nce los ntawm 99.0 mus rau 99.67\(\%\) (Daim duab 1d–e), qhov dav ntawm thaj tsam ci ntsa iab tau nce, uas ua rau pom cov teeb liab DLIP rau ntau tshaj qhov siab zaus.wavenumbers (tsawg zaus) thiab yog li hloov mus rau qhov chaw ntawm FFT.Cov kab ntawm cov pits hauv daim duab 1d tej zaum yuav yog cov precursors ntawm qhov hu ua grooves tsim perpendicular rau LSFL-I22,27.Tsis tas li ntawd, LSFL-II zoo li tau ua luv luv thiab tsis zoo li qub.Nco ntsoov tias qhov nruab nrab qhov loj me ntawm cov kab ci ntsa iab nrog nanograin morphology yog qhov me dua hauv qhov no.Tsis tas li ntawd, qhov loj me me ntawm cov nanoparticles no tau muab faib ua tsawg dua (los yog coj mus rau qhov tsis tshua muaj qhov sib txuam) dua li tsis muaj cua sov.Qhov zoo, qhov no tuaj yeem ntsuas tau los ntawm kev sib piv cov duab 1a, d lossis b, e, raws.
Raws li qhov sib tshooj \(o_{\mathrm {p}}\) tau nce ntxiv mus rau 99.67% (Daim duab 1f), qhov sib txawv ntawm qhov chaw maj mam tshwm sim vim qhov pom tseeb zuj zus.Txawm li cas los xij, cov grooves no tshwm sim tsawg dua thiab qis dua hauv daim duab 1c.Qhov sib txawv tsawg ntawm lub teeb thiab qhov tsaus ntuj ntawm daim duab qhia tau zoo.Cov txiaj ntsig no tau txais kev txhawb ntxiv los ntawm qhov tsis muaj zog thiab tawg tawg ntau dua ntawm FFT ordinate hauv daim duab 1f piv rau FFT ntawm c.Cov striae me me kuj tau tshwm sim ntawm cov cua sov thaum piv cov duab 1b thiab e, uas tom qab tau lees paub los ntawm confocal microscopy.
Ntxiv rau qhov kev sim yav dhau los, lub polarization ntawm lub laser beam tau tig los ntawm 90 \(^{\circ}\), uas ua rau cov kev taw qhia polarization txav mus rau qhov chaw ntawm lub platform.Ntawm daim duab.2a-c qhia cov theem pib ntawm kev tsim qauv, \(o_{\mathrm {p}}\) = 99.0% hauv unheated (a), rhuab (b) thiab rhuab 90\(^{\ circ }\ ) – Case nrog rotating polarization (c).Txhawm rau pom cov duab nanotopography ntawm cov qauv, cov cheeb tsam cim nrog cov xim squares tau qhia hauv Fig.2d, ntawm qhov loj me.
SEM cov duab ntawm cov qauv saum npoo tsim siv DLIP.Cov txheej txheem tsis yog tib yam li hauv Fig.1.Daim duab qhia cov qauv ntsuas kub \(T_s\), polarization thiab pulse overlap \(o_\mathrm {p}\).Lub inset dub dua qhia qhov sib thooj Fourier transform.Cov duab hauv (d)-(i) yog qhov loj ntawm qhov chaw cim hauv (a)-(c).
Nyob rau hauv cov ntaub ntawv no, nws yuav pom tau hais tias cov qauv nyob rau hauv lub darker cheeb tsam ntawm daim duab 2b, c yog polarization rhiab heev thiab yog li ntawd sau npe LSFL-II14, 20, 29, 30. notably, lub orientation ntawm LSFL-I kuj tig ( Fig. 2g, i), uas tuaj yeem pom los ntawm kev taw qhia ntawm s-hom teeb liab nyob rau hauv qhov sib thooj FFT.Lub bandwidth ntawm LSFL-I lub sij hawm zoo nkaus li loj dua piv rau lub sij hawm b, thiab nws qhov ntau yog hloov mus rau lub sij hawm me me hauv daim duab 2c, raws li qhia los ntawm cov teeb liab ntau dua s.Yog li, lub sijhawm LSFL spatial nram qab no tuaj yeem pom ntawm cov qauv ntawm qhov sib txawv ntawm cov cua sov: \(\Lambda _{\mathrm {LSFL-I}}\) = 418\(\pm 65\) nm ntawm 21 ^{ \circ }\ )C (Fig. 2a), \(\Lambda _{\mathrm {LSFL-I}}\) = 445\(~\pm\) 67 nm and \(\Lambda _{\mathrm {LSFL-II }} \) = 247 ± 35 nm ntawm 250 ° C (Fig. 2b) rau s polarization.Ntawm qhov tsis sib xws, lub sijhawm spatial ntawm p-polarization thiab 250 \(^{\circ }\)C yog sib npaug rau \(\Lambda _{\mathrm {LSFL-I))\) = 390\(\pm 55\ ) nm and \(\Lambda_{\mathrm{LSFL-II}}\) = 265±35 nm (Fig. 2c).
Qhov tseem ceeb, cov txiaj ntsig tau pom tias tsuas yog los ntawm kev nce tus qauv ntsuas kub, qhov chaw morphology tuaj yeem hloov pauv ntawm ob qhov siab, suav nrog (i) qhov chaw uas muaj cov ntsiab lus LSFL-I nkaus xwb thiab (ii) thaj chaw them nrog LSFL-II.Vim tias qhov tsim ntawm hom LIPSS ntawm cov hlau no cuam tshuam nrog cov txheej txheem oxide txheej, lub zog cuam tshuam X-ray tsom (EDX) tau ua.Table 1 qhia txog cov txiaj ntsig tau.Txhua qhov kev txiav txim siab yog ua los ntawm qhov nruab nrab tsawg kawg yog plaub lub spectra nyob rau ntau qhov chaw ntawm qhov chaw ntawm cov qauv ua tiav.Cov kev ntsuas tau ua nyob rau ntawm qhov sib txawv ntawm cov qauv ntsuas kub \(T_\mathrm{s}\) thiab cov haujlwm sib txawv ntawm cov qauv saum npoo uas tsis muaj cov qauv lossis cov qauv tsim.Cov kev ntsuas kuj tseem muaj cov ntaub ntawv hais txog cov txheej txheem sib sib zog nqus uas tsis muaj oxidized uas nyob ncaj qha hauv qab qhov chaw kho molten, tab sis nyob rau hauv qhov tob ntawm electron nkag mus rau EDX tsom xam.Txawm li cas los xij, nws yuav tsum raug sau tseg tias EDX tsuas yog txwv rau nws lub peev xwm los ntsuas cov ntsiab lus ntawm cov pa oxygen, yog li cov txiaj ntsig ntawm no tsuas yog muab qhov kev ntsuas zoo.
Cov feem tsis kho ntawm cov qauv tsis qhia cov pa oxygen loj ntawm txhua qhov kev ua haujlwm kub.Tom qab kev kho laser, cov pa oxygen nce ntxiv hauv txhua kis31.Qhov sib txawv ntawm qhov sib txawv ntawm ob qhov kev kuaj tsis tau kho yog raws li qhov xav tau rau cov qauv kev lag luam steel, thiab cov pa roj carbon ntau dua tau pom pom piv rau cov chaw tsim khoom cov ntaub ntawv rau AISI 304 steel vim hydrocarbon contamination32.
Ua ntej sib tham txog cov laj thawj muaj peev xwm rau qhov txo qis hauv qhov tob ntawm qhov tob thiab qhov kev hloov ntawm LSFL-I mus rau LSFL-II, lub zog spectral ntom ntom (PSD) thiab qhov siab profile yog siv.
(i) Lub quasi-ob-dimensional normalized power spectral density (Q2D-PSD) ntawm qhov chaw yog qhia raws li SEM cov duab nyob rau hauv daim duab 1 thiab 2. 1 thiab 2. Txij li thaum PSD yog normalized, ib tug txo nyob rau hauv lub sum signal yuav tsum tau. nkag siab tias qhov nce ntawm qhov tsis tu ncua (k \(\le\) 0.7 µm\(^{-1}\), tsis qhia), piv txwv li smoothness.(ii) Raws li qhov nruab nrab qhov siab profile.Piv txwv kub \(T_s\), sib tshooj \(o_{\mathrm {p}}\), thiab laser polarization E txheeb ze rau kev taw qhia \(\vec {v}\) ntawm qhov chaw platform txav tau pom nyob rau hauv tag nrho cov phiaj xwm.
Txhawm rau txhawm rau ntsuas qhov kev xav ntawm SEM cov duab, qhov nruab nrab ntawm qhov nruab nrab lub zog spectrum tau tsim los ntawm tsawg kawg peb SEM cov duab rau txhua qhov ntsuas los ntawm qhov nruab nrab ntawm txhua qhov ib-dimensional (1D) lub zog spectral ntom ntom (PSDs) hauv x lossis y kev taw qhia.Cov duab sib thooj tau pom nyob rau hauv daim duab 3i qhia qhov zaus hloov ntawm lub teeb liab thiab nws cov txheeb ze koom nrog rau lub spectrum.
Ntawm daim duab.3ia, c, e, DLIP peak grows near \(k_{\mathrm {DLIP}}~=~2\pi\) (4.5 µm)\(^{-1}\) = 1.4 µm \(^{- 1}\) lossis cov sib raug zoo dua qub raws li qhov sib tshooj nce \(o_{\mathrm {p))\).Ib qho kev nce hauv qhov tseem ceeb amplitude tau cuam tshuam nrog kev txhim kho muaj zog ntawm LRIB qauv.Lub amplitude ntawm ntau dua harmonics nce nrog lub steepness ntawm txoj kab nqes.Rau cov kev ua haujlwm zoo li kev txwv, qhov kwv yees yuav tsum muaj ntau zaus.Yog li ntawd, lub ncov nyob ib ncig ntawm 1.4 µm \ (^{-1}\) nyob rau hauv PSD thiab cov harmonics coj mus siv tau raws li qhov tsis zoo rau cov duab ntawm lub zawj.
Ntawm qhov tsis sib xws, raws li qhia hauv daim duab 3(i) b,d,f, PSD ntawm cov qauv rhuab qhia tias tsis muaj zog thiab dav dua peaks nrog cov teeb liab tsawg hauv cov kev sib raug zoo.Tsis tas li ntawd, hauv daim duab.3.Qhov no qhia txog qhov tsis xwm yeem thiab tsis tshua muaj DLIP qauv ntawm cov qauv rhuab (piv rau \(T_s\) = 21\(^\circ\)C).Lwm qhov tshwj xeeb yog tias thaum sib tshooj \(o_{\mathrm {p}}\) nce, qhov tshwm sim LSFL-I teeb liab hloov mus rau ib qho me me wavenumber (ntev ntev).Qhov no tuaj yeem piav qhia los ntawm qhov nce siab ntawm cov npoo ntawm DLIP hom thiab qhov cuam tshuam hauv zos nce hauv lub kaum sab xis ntawm qhov xwm txheej 14,33.Ua raws li cov qauv no, kev nthuav dav ntawm LSFL-I teeb liab kuj tuaj yeem piav qhia.Ntxiv nrog rau qhov chaw siab tshaj, kuj tseem muaj thaj chaw tiaj tiaj nyob rau hauv qab thiab saum toj kawg nkaus ntawm cov qauv DLIP, tso cai rau ntau lub sijhawm ntawm LSFL-I.Rau cov ntaub ntawv absorbent heev, lub sij hawm LSFL-I feem ntau kwv yees li:
qhov twg \(\theta\) yog lub kaum sab xis ntawm qhov tshwm sim, thiab cov subscripts s thiab p xa mus rau txawv polarizations33.
Nws yuav tsum tau muab sau tseg tias lub dav hlau ntawm qhov tshwm sim rau ib tug DLIP teeb yog feem ntau yog perpendicular mus rau lub zog ntawm lub positioning platform, raws li qhia nyob rau hauv daim duab 4 (saib cov khoom thiab cov txheej txheem seem).Yog li ntawd, s-polarization, raws li txoj cai, yog thaum uas tig mus rau lub zog ntawm theem, thiab p-polarization yog perpendicular rau nws.Raws li qhov sib npaug.(1), rau s-polarization, kev sib kis thiab kev hloov ntawm LSFL-I teeb liab mus rau me me wavenumbers yuav tsum.Qhov no yog vim qhov nce hauv \(\theta\) thiab angular ntau \(\theta \pm \delta \theta\) raws li qhov tob tob nce.Qhov no tuaj yeem pom los ntawm kev sib piv LSFL-I peaks hauv daim duab 3ia,c,e.
Raws li cov txiaj ntsig tau pom hauv daim duab.1c, LSFL\(_\mathrm {edge}\) kuj pom nyob rau hauv qhov sib thooj PSD hauv daim duab.3 ib ie.Ntawm daim duab.3ig, h qhia PSD rau p-polarization.Qhov sib txawv ntawm DLIP peaks yog qhia ntau dua ntawm cov qauv rhuab thiab unheated.Nyob rau hauv cov ntaub ntawv no, lub teeb liab los ntawm LSFL-I overlaps nrog lub siab dua harmonics ntawm lub DLIP ncov, ntxiv rau lub teeb liab nyob ze ntawm lub lasing wavelength.
Txhawm rau sib tham txog cov txiaj ntsig tau nthuav dav ntxiv, hauv daim duab 3ii qhia qhov tob ntawm cov qauv thiab sib tshooj ntawm cov pulses ntawm DLIP linear qhov siab faib ntawm ntau qhov kub.Qhov ntsug qhov siab ntawm qhov saum npoo tau txais los ntawm qhov nruab nrab ntawm kaum tus neeg ntsug qhov siab profile nyob ib ncig ntawm qhov chaw ntawm DLIP qauv.Rau txhua qhov kev thov kub, qhov tob ntawm cov qauv nce nrog kev nce siab sib tshooj.Qhov profile ntawm cov qauv rhuab qhia cov grooves nrog qhov nruab nrab ntawm peak-to-peak (pvp) qhov tseem ceeb ntawm 0.87 µm rau s-polarization thiab 1.06 µm rau p-polarization.Nyob rau hauv sib piv, s-polarization thiab p-polarization ntawm cov qauv unheated qhia pvp ntawm 1.75 µm thiab 2.33 µm, feem.Qhov sib thooj pvp tau piav qhia hauv qhov siab qhov profile hauv daim duab.3 ib ii.Txhua PvP nruab nrab yog xam los ntawm qhov nruab nrab yim PvPs.
Tsis tas li ntawd, hauv daim duab.3iig, h qhia p-polarization qhov siab tis perpendicular mus rau qhov chaw qhov system thiab zawj txav.Kev taw qhia ntawm p-polarization muaj qhov zoo ntawm qhov tob ntawm qhov zawj vim nws ua rau me ntsis siab dua pvp ntawm 2.33 µm piv rau s-polarization ntawm 1.75 µm pvp.Qhov no nyob rau hauv lem sib raug mus rau grooves thiab txav ntawm qhov chaw platform system.Cov nyhuv no tuaj yeem tshwm sim los ntawm cov qauv me me nyob rau hauv cov ntaub ntawv ntawm s-polarization piv rau cov ntaub ntawv ntawm p-polarization (saib daim duab 2f, h), uas yuav tau tham ntxiv nyob rau hauv nqe lus tom ntej.
Lub hom phiaj ntawm kev sib tham yog piav qhia txog qhov txo qis hauv qhov tob ntawm qhov zawj vim qhov kev hloov pauv hauv chav LIPS lub ntsiab (LSFL-I rau LSFL-II) nyob rau hauv rooj plaub ntawm cov qauv rhuab.Yog li teb cov lus nug hauv qab no:
Txhawm rau teb cov lus nug thawj zaug, nws yog ib qho tsim nyog yuav tsum xav txog cov txheej txheem ua lub luag haujlwm rau kev txo qis hauv ablation.Rau ib qho mem tes ntawm qhov xwm txheej ib txwm, qhov ablation qhov tob tuaj yeem piav qhia raws li:
qhov twg \(\delta _{\mathrm {E}}\) yog lub zog nkag mus tob, \(\Phi\) thiab \(\Phi _{\mathrm {th}}\) yog lub absorption fluence thiab Ablation fluence. qib, 34.
Kev ua lej, qhov tob ntawm lub zog nkag mus rau qhov tob ntawm lub zog muaj qhov sib npaug ntawm qhov tob ntawm ablation, thaum qhov kev hloov ntawm lub zog muaj cov nyhuv logarithmic.Yog li kev hloov pauv fluence tsis cuam tshuam rau \(\Delta z\) ntev npaum li \(\Phi ~\gg ~\Phi _{\mathrm {th}}\).Txawm li cas los xij, muaj zog oxidation (piv txwv li, vim yog qhov tsim ntawm chromium oxide) ua rau muaj zog Cr-O35 daim ntawv cog lus piv rau Cr-Cr daim ntawv cog lus, yog li nce qhov pib ablation.Yog li ntawd, \(\Phi ~\gg ~\Phi _{\mathrm {th}}\) tsis txaus siab, uas ua rau kom ceev ceev hauv qhov tob ablation nrog txo lub zog flux ceev.Tsis tas li ntawd, kev sib raug zoo ntawm lub xeev oxidation thiab lub sijhawm ntawm LSFL-II paub, uas tuaj yeem piav qhia los ntawm kev hloov pauv hauv nanostructure nws tus kheej thiab cov khoom siv kho qhov muag ntawm qhov chaw tshwm sim los ntawm qhov chaw oxidation30,35.Yog li ntawd, qhov tseeb ntawm qhov chaw faib tawm ntawm qhov nqus nqus dej \(\Phi\) yog vim muaj kev sib txuam ntawm kev sib cuam tshuam ntawm cov txheej txheem lub sij hawm thiab lub thickness ntawm oxide txheej.Nyob ntawm lub sijhawm, tus nanostructure muaj zog cuam tshuam rau kev faib tawm ntawm lub zog nqus dej vim muaj qhov nce ntxiv hauv thaj teb, excitation ntawm plasmons saum npoo, lub teeb hloov pauv txawv txav lossis tawg 17,19,20,21.Yog li ntawd, \(\Phi\) yog inhomogeneous nyob ze ntawm qhov chaw, thiab \(\delta _ {E}\) tej zaum yuav tsis tau nrog ib tug absorption coefficient \(\alpha = \delta _{\ mathrm {opt} } } ^ { -1} \approx \delta _{\mathrm {E}}^{-1}\) rau tag nrho cov ntim ze.Txij li lub thickness ntawm cov oxide zaj duab xis feem ntau nyob ntawm lub sij hawm solidification [26], cov nyhuv nomenclature nyob ntawm tus qauv ntsuas kub.Cov khoom siv kho qhov muag pom hauv daim duab S1 hauv Cov Khoom Siv Ntxiv qhia txog kev hloov pauv ntawm cov khoom kho qhov muag.
Cov teebmeem no ib nrab piav qhia txog qhov tob tob hauv qhov chaw me me hauv cov duab 1d,e thiab 2b,c thiab 3(ii)b,d,f.
LSFL-II paub tias tsim nyob rau hauv semiconductors, dielectrics, thiab cov ntaub ntawv nquag oxidation14,29,30,36,37.Nyob rau hauv tas li ntawd, lub thickness ntawm lub nto oxide txheej yog tshwj xeeb tshaj yog tseem ceeb 30.Kev tshuaj xyuas EDX tau ua tiav qhia qhov tsim ntawm oxides saum npoo ntawm cov txheej txheem.Yog li, rau cov qauv uas tsis muaj cua sov, ambient oxygen zoo li ua rau ib feem ntawm cov pa roj carbon monoxide thiab qee qhov tsim cov oxides.Ob qho xwm txheej ua rau muaj txiaj ntsig zoo rau txoj haujlwm no.Ntawm qhov tsis sib xws, rau cov qauv ntsuas kub, cov hlau oxides ntawm ntau lub xeev oxidation (SiO\(_{\mathrm {2}}\), Cr\(_{\mathrm {n}}\)O\(_{\mathrm { m}}\ ), Fe\(_{\mathrm {n}}\)O\(_{\mathrm {m}}\), NiO, etc.) are clear 38 in favor.Ntxiv nrog rau cov txheej txheem oxide uas yuav tsum tau muaj, muaj qhov muaj zog ntawm subwavelength roughness, feem ntau yog siab spatial zaus LIPSS (HSFL), yog tsim nyog los tsim cov subwavelength (d-type) siv hom 14,30.Qhov kawg LSFL-II siv hom yog qhov ua haujlwm ntawm HSFL amplitude thiab oxide thickness.Yog vim li cas rau hom no yog qhov kev cuam tshuam deb ntawm lub teeb tawg los ntawm HSFL thiab lub teeb refracted rau hauv cov khoom thiab nthuav tawm hauv cov khoom siv dielectric nto 20,29,30.SEM cov duab ntawm ntug ntawm tus qauv saum npoo hauv daim duab S2 hauv Cov Khoom Siv Ntxiv yog qhia txog HSFL ua ntej.Lub cheeb tsam sab nrauv no tsis muaj zog cuam tshuam los ntawm qhov chaw nruab nrab ntawm kev siv zog faib, uas tso cai rau tsim HSFL.Vim lub symmetry ntawm kev siv tis, cov nyhuv no kuj tshwm sim nyob rau hauv lub scanning kev taw qhia.
Cov qauv cua sov cuam tshuam rau LSFL-II txheej txheem tsim nyob rau hauv ntau txoj kev.Ntawm qhov tod tes, qhov nce ntawm cov qauv ntsuas kub \(T_\mathrm{s}\) muaj qhov cuam tshuam ntau dua ntawm tus nqi ntawm cov khoom khov thiab txias dua li cov tuab ntawm cov txheej molten26.Yog li, cov kua sib txuas ntawm cov qauv rhuab yog raug rau ambient oxygen rau lub sijhawm ntev.Tsis tas li ntawd, ncua sij hawm solidification tso cai rau txoj kev loj hlob ntawm complex convective txheej txheem uas ua rau kom cov sib tov ntawm oxygen thiab oxides nrog kua steel26.Qhov no tuaj yeem pom tau los ntawm kev sib piv cov thickness ntawm cov oxide txheej tsim los ntawm diffusion (\(\Lambda _\mathrm {diff}=\sqrt{D~\times ~t_\mathrm {s}}~\le ~15\) nm) Lub sij hawm coagulation sib raug yog \(t_\mathrm {s}~\le ~200\) ns, thiab diffusion coefficient \(D~\le\) 10\(^{-5}\) cm\(^ 2 \ ) / s) Cov thickness ntau dua tau pom lossis xav tau hauv LSFL-II formation30.Ntawm qhov tod tes, cua sov kuj cuam tshuam rau kev tsim ntawm HSFL thiab yog li cov khoom tawg yuav tsum tau hloov mus rau LSFL-II d-hom kev siv hom.Qhov raug ntawm nanovoids daig hauv qab ntawm qhov chaw qhia lawv txoj kev koom tes hauv kev tsim HSFL39.Cov teeb meem no tuaj yeem sawv cev rau lub hauv paus hauv electromagnetic ntawm HSFL vim qhov yuav tsum tau muaj cov qauv siv ntau zaus 14,17,19,29.Tsis tas li ntawd, cov qauv tsim tawm no muaj ntau yam sib xws nrog ntau tus nanovoids19.Yog li, qhov laj thawj rau qhov tshwm sim ntawm HSFL tuaj yeem piav qhia los ntawm qhov kev hloov pauv ntawm cov khoom siv lead ua tsis xws li \(T_\mathrm{s}\) nce.
Nws tsis ntev los no tau pom tias qhov cua txias ntawm silicon yog qhov tseem ceeb tsis zoo rau intrinsic interstitial supersaturation thiab yog li rau qhov tsub zuj zuj ntawm point defects nrog tsim ntawm dislocations40,41.Molecular dynamics simulations ntawm cov hlau ntshiab tau pom tias cov khoom tsis muaj supersaturate thaum lub sij hawm recrystallization ceev, thiab li no cov tsub zuj zuj ntawm vacancy nyob rau hauv cov hlau ua tau zoo ib yam li 42,43,44.Tsis tas li ntawd, cov kev tshawb fawb tsis ntev los no ntawm cov nyiaj tau tsom mus rau cov txheej txheem ntawm kev tsim cov voids thiab pawg vim qhov sib txuam ntawm cov ntsiab lus tsis raug 45.Yog li ntawd, qhov nce ntawm qhov ntsuas kub ntawm cov qauv \(T_\mathrm {s}\) thiab, yog li ntawd, qhov txo qis hauv qhov txias tuaj yeem cuam tshuam rau kev tsim cov voids, uas yog cov nuclei ntawm HSFL.
Yog tias qhov chaw tsis txaus yog qhov tsim nyog ua ntej rau kab noj hniav thiab yog li HSFL, tus qauv ntsuas kub \(T_s\) yuav tsum muaj ob qhov cuam tshuam.Ntawm ib sab, \(T_s\) cuam tshuam tus nqi ntawm recrystallization thiab, yog li ntawd, qhov concentration ntawm cov ntsiab lus tsis xws luag (vacancy concentration) nyob rau hauv zus tau tej cov crystal.Ntawm qhov tod tes, nws tseem cuam tshuam rau qhov txias txias tom qab solidification, yog li cuam tshuam rau qhov sib txawv ntawm qhov tsis xws luag hauv cov siv lead ua 40,41.Tsis tas li ntawd, tus nqi solidification nyob ntawm crystallographic orientation thiab yog li anisotropic heev, raws li yog qhov diffusion ntawm point defects42,43.Raws li qhov kev pom zoo no, vim yog cov lus teb anisotropic ntawm cov khoom, kev sib cuam tshuam ntawm lub teeb thiab teeb meem ua anisotropic, uas nyob rau hauv lem amplifies no deterministic periodic tso tawm ntawm lub zog.Rau cov ntaub ntawv polycrystalline, tus cwj pwm no tuaj yeem raug txwv los ntawm qhov loj ntawm ib qho nplej.Qhov tseeb, LIPSS tsim tau pom nyob ntawm cov nplej orientation46,47.Yog li ntawd, cov nyhuv ntawm cov qauv ntsuas kub \(T_s\) ntawm cov crystallization tus nqi yuav tsis muaj zog npaum li cov nyhuv ntawm grain orientation.Yog li, qhov sib txawv crystallographic orientation ntawm cov nplej sib txawv muab cov lus piav qhia txog qhov nce hauv qhov tsis muaj dab tsi thiab sib sau ua ke ntawm HSFL lossis LSFL-II, feem.
Txhawm rau kom paub meej qhov kev qhia thawj zaug ntawm qhov kev xav no, cov qauv nyoos tau etched kom pom cov qoob loo ze rau ntawm qhov chaw.Kev sib piv ntawm cov nplej hauv daim duab.S3 tau qhia hauv cov khoom siv ntxiv.Tsis tas li ntawd, LSFL-I thiab LSFL-II tau tshwm sim hauv cov pab pawg ntawm cov qauv rhuab.Qhov loj thiab geometry ntawm cov pawg no sib haum rau cov nplej loj.
Ntxiv mus, HSFL tsuas yog tshwm sim hauv qhov nqaim ntawm qhov qis qis vim nws cov keeb kwm convective19,29,48.Yog li ntawd, hauv kev sim, qhov no tej zaum tsuas yog tshwm sim ntawm qhov periphery ntawm lub nqaj profile.Yog li ntawd, HSFL tsim rau ntawm qhov chaw uas tsis muaj oxidized los yog tsis muaj zog oxidized, uas tau pom tseeb thaum muab piv cov oxide feem ntawm cov qauv kho thiab tsis kho (saib cov lus reftab: piv txwv).Qhov no lees paub qhov kev xav tias cov oxide txheej feem ntau yog ntxias los ntawm laser.
Muab hais tias LIPSS tsim feem ntau yog nyob ntawm tus naj npawb ntawm cov pulses vim yog cov lus qhia ntawm cov mem tes, HSFLs tuaj yeem hloov los ntawm cov qauv loj dua li cov mem tes sib tshooj nce 19.Ib qho HSFL tsis tu ncua ua rau muaj tus qauv siv tsis tu ncua (d-hom) xav tau rau kev tsim LSFL-II.Yog li ntawd, raws li qhov sib tshooj ntawm \(o_\mathrm {p}\) nce (saib daim duab 1 ntawm de), qhov tsis tu ncua ntawm LSFL-II txo.
Txoj kev tshawb no tshawb xyuas qhov cuam tshuam ntawm qhov kub thiab txias ntawm qhov chaw morphology ntawm laser DLIP kho stainless hlau.Nws tau pom tias cua sov lub substrate los ntawm 21 mus rau 250 ° C ua rau txo qis hauv ablation qhov tob ntawm 1.75 mus rau 0.87 µm hauv s-polarization thiab los ntawm 2.33 mus rau 1.06 µm hauv p-polarization.Qhov kev txo qis no yog vim qhov hloov pauv hauv LIPSS hom los ntawm LSFL-I mus rau LSFL-II, uas yog txuam nrog laser-induced nto oxide txheej ntawm cov qauv kub dua.Tsis tas li ntawd, LSFL-II tuaj yeem nce qhov pib flux vim muaj oxidation ntau ntxiv.Nws tau kwv yees tias nyob rau hauv cov txheej txheem thev naus laus zis nrog lub zog siab sib tshooj, qhov tshwm sim nruab nrab ntawm LSFL-II kuj tseem tau txiav txim siab los ntawm kev hloov pauv ntawm kev coj ua cua sov.Kev sib sau ua ke ntawm LSFL-II yog qhov kev xav tias yog vim li cas ntawm cov nplej orientation-dependent nanovoid tsim, ua rau HSFL ua tus thawj coj rau LSFL-II.Tsis tas li ntawd, kev cuam tshuam ntawm kev taw qhia ntawm polarization ntawm lub sij hawm tus qauv thiab bandwidth ntawm lub sij hawm qauv yog kawm.Nws hloov tawm tias p-polarization yog qhov ua tau zoo dua rau cov txheej txheem DLIP nyob rau hauv cov nqe lus ntawm ablation qhov tob.Zuag qhia tag nrho, txoj kev tshawb no nthuav tawm cov txheej txheem txheej txheem los tswj thiab ua kom zoo dua qhov tob ntawm DLIP ablation los tsim cov qauv txheej txheem.Thaum kawg, kev hloov pauv ntawm LSFL-I mus rau LSFL-II yog tag nrho cov cua sov uas tau tsav thiab qhov kev nce me me ntawm qhov rov ua dua yuav tsum tau nrog cov mem tes tas li vim muaj cua sov ntau ntxiv.Tag nrho cov no muaj feem cuam tshuam rau qhov kev sib tw yav tom ntej ntawm kev nthuav dav DLIP txheej txheem, piv txwv li los ntawm kev siv cov tshuab luam ntawv polygonal49.Txhawm rau txo qis cov cua sov, cov tswv yim hauv qab no tuaj yeem ua raws li: khaws cov scanning ceev ntawm polygonal scanner kom siab npaum li qhov ua tau, ua kom zoo dua ntawm qhov loj ntawm laser qhov chaw loj, orthogonal mus rau scanning kev taw qhia, thiab siv qhov zoo tshaj plaws ablation.fluence 28. Tsis tas li ntawd, cov tswv yim no tso cai rau cov creation ntawm complex hierarchical topography rau advanced nto functionalization siv DLIP.
Hauv txoj kev tshawb no, electropolished stainless hlau daim hlau (X5CrNi18-10, 1.4301, AISI 304) 0.8 hli tuab tau siv.Txhawm rau tshem tawm cov khoom paug tawm ntawm qhov chaw, cov qauv tau ua tib zoo ntxuav nrog ethanol ua ntej kho laser (qhov tseeb ntawm ethanol \(\ge\) 99.9%).
Qhov chaw DLIP tau qhia hauv daim duab 4. Cov qauv tau tsim los siv DLIP qhov nruab nrog 12 ps ultrashort pulsed laser qhov chaw nrog lub wavelength ntawm 532 nm thiab qhov siab tshaj qhov rov ua dua ntawm 50 MHz.Lub spatial faib ntawm cov nqaj zog yog Gaussian.Tshwj xeeb tsim optics muab ib tug dual-beam interferometric configuration los tsim linear qauv ntawm cov qauv.Lub lens nrog lub focal ntev ntawm 100 hli superimposes ob lub laser ntxiv rau ntawm qhov chaw ntawm lub kaum sab xis ntawm 6.8 \ (^ \ circ \), uas muab lub sij hawm spatial txog li 4.5 µm.Xav paub ntau ntxiv ntawm kev sim teeb tsa tuaj yeem pom nyob rau lwm qhov 50.
Ua ntej laser ua, cov qauv muab tso rau ntawm lub phaj cua sov ntawm qhov kub thiab txias.Qhov kub ntawm lub phaj cua sov yog teem rau ntawm 21 thiab 250 ° C.Hauv txhua qhov kev sim, lub dav hlau transverse ntawm compressed cua tau siv ua ke nrog lub tshuab tso pa tawm kom tsis txhob muaj plua plav tawm ntawm cov khoom siv kho qhov muag.Ib qho x, y theem system tau teeb tsa los ua tus qauv thaum lub sijhawm ua haujlwm.
Qhov ceev ntawm qhov chaw nyob theem system tau txawv ntawm 66 mus rau 200 mm / s kom tau txais kev sib tshooj ntawm pulses ntawm 99.0 txog 99.67 \(\%\) feem.Nyob rau hauv txhua rooj plaub, tus nqi rov ua dua tau kho ntawm 200 kHz, thiab qhov nruab nrab lub zog yog 4 W, uas muab lub zog rau ib qho mem tes ntawm 20 μJ.Lub beam txoj kab uas hla siv nyob rau hauv qhov kev sim DLIP yog hais txog 100 µm, thiab lub resulting ncov laser zog ceev yog 0.5 J / cm\(^{2}\).Tag nrho lub zog tso tawm hauv ib cheeb tsam yog lub ncov sib npaug sib npaug rau 50 J / cm\(^2\) rau \(o_{\mathrm {p}}\) = 99.0 \(\%\), 100 J / cm \(^2\) for \(o_{\mathrm {p))\)=99.5\(\%\) and 150 J/cm\(^2\) for \(o_{ \mathrm {p} }\ ) = 99.67 \(\%\).Siv lub \(\lambda\)/2 phaj hloov lub polarization ntawm lub laser beam.Rau txhua qhov kev txwv tsis pub siv, thaj tsam ntawm kwv yees li 35 × 5 mm \ (^{2}\) yog textured ntawm tus qauv.Txhua qhov kev sim ua qauv tau ua nyob rau hauv ib puag ncig kom ntseeg tau tias muaj kev siv tau.
Cov morphology ntawm cov qauv tau kuaj xyuas siv lub tshuab ntsuas confocal nrog 50x magnification thiab kho qhov muag thiab ntsug ntawm 170 nm thiab 3 nm, raws li.Tom qab ntawd cov ntaub ntawv sau los saum toj saud tau raug soj ntsuam los ntawm kev txheeb xyuas qhov chaw software.Extract profiles los ntawm cov ntaub ntawv struts raws li ISO 1661051.
Cov qauv no kuj tau pom zoo siv lub tshuab ntsuas hluav taws xob hauv tshuab hluav taws xob ntawm qhov nrawm nrawm ntawm 6.0 kV.Cov tshuaj muaj pes tsawg leeg ntawm qhov chaw ntawm cov qauv raug soj ntsuam siv lub zog-dispersive X-ray spectroscopy (EDS) txuas ntawm qhov nrawm nrawm ntawm 15 kV.Tsis tas li ntawd, lub tshuab kho qhov muag nrog lub hom phiaj 50x tau siv los txiav txim siab granular morphology ntawm microstructure ntawm cov qauv. Ua ntej ntawd, cov qauv raug etched ntawm qhov ntsuas kub tsis tu ncua ntawm 50 \(^\circ\)C rau tsib feeb nyob rau hauv ib lub stainless hlau stain nrog hydrochloric acid thiab nitric acid concentration ntawm 15-20 \(\%\) thiab 1\( -<\)5 \(\%\), raws. Ua ntej ntawd, cov qauv raug etched ntawm qhov ntsuas kub tsis tu ncua ntawm 50 \(^\circ\)C rau tsib feeb nyob rau hauv ib lub stainless hlau stain nrog hydrochloric acid thiab nitric acid concentration ntawm 15-20 \(\%\) thiab 1\( -<\)5 \(\%\), raws. Перед этим образцы травили при постоянной температуре 50 \(^\circ\)S в течение пяти минут в зинске и крайске ой и азотной кислотами концентрацией 15-20 \(\%\) и 1\(-<\)5 \( \%\) сответственно. Ua ntej ntawd, cov qauv raug etched ntawm qhov kub thiab txias ntawm 50 \ (^ \ circ \) C rau tsib feeb hauv stainless hlau xim nrog hydrochloric thiab nitric acids nrog ib tug concentration ntawm 15-20 \ (\% \) thiab 1 \ ( -<\)5 \(\%\) raws.在此之前，样品在不锈钢染色液中以50 \(^\circ\)C 的恒温蚀刻五分钟，盐酸和硝馅5 咓\) 5 \ (\%\), 分别.在此之前，样品在不锈钢染色液中以50 \(^\circ\)C (\%\), 分别.Ua ntej ntawd, cov qauv tau muab khaws cia rau tsib feeb ntawm qhov ntsuas kub tsis tu ncua ntawm 50 \(^\circ\)C hauv cov tshuaj staining rau stainless hlau nrog cov concentration ntawm hydrochloric thiab nitric acids 15-20 \(\%\) thiab 1. \.(-<\)5 \ (\%\) соответственно. (-<\)5 \ (\%\) raws.
Schematic daim duab ntawm kev sim teeb tsa ntawm ob-beam DLIP teeb, suav nrog (1) lub teeb laser, (2) a \(\lambda\)/2 phaj, (3) lub taub hau DLIP nrog qee qhov kev teeb tsa kho qhov muag, (4) ) lub phaj kub, (5) tus ntoo khaub lig-fluidic, (6) x, y qhov chaw tso cov kauj ruam thiab (7) cov qauv stainless hlau.Ob txoj kab teeb pom kev zoo, ua voj voog liab ntawm sab laug, tsim cov qauv kab ntawm cov qauv ntawm \(2\theta\) cov ces kaum (xws li ob qho tib si s- thiab p-polarization).
Cov ntaub ntawv siv thiab / lossis tshuaj ntsuam hauv txoj kev tshawb fawb tam sim no muaj los ntawm cov kws sau ntawv raws li qhov kev thov tsim nyog.
Post lub sij hawm: Jan-07-2023